Mask Aligner M25

Mask Aligner Karl Suss MA 25 (refurbished by expert), up to 5” Wafer or Substrate

BSA

TSA

With vibration isolation

Cassette to cassette handling

Alignment stage: X, Y, Q

Compressed air and nitrogen

Maximum Pre-align station, 5"

Objective: 30x

Transport plates kit: W-4"

Chuck cont: W- 4"-5"

Maskholder: W- 4"

Exposure unit: MA 150 LH 350 W 2x

Exposure optic: UV400

CIC 500 Lamp power supply

Manual

Power supply: 230 V, 50 Hz