Mask Aligner

- MA200CC Main System
- Automatic Mask Aligner
- Configured for Top Side Alignment
- Cassette to Cassette Operation
- Up to 8“/200mm wafer capable
- Large Clear Field Proximity Maskholder for 9” corner masks, with 8“ exposure area
- Vacuum Chuck: 8” Thermal Proximity Chuck
- Maskholder: 9“x9” Maskholder
- Lamp House: Model LH5000 (5000 Watt)
- Power Supply: Suss CIC 5000 Power Supply
- UV400 Optics (for 365nm & 405 nm exposure) with G-Line Filter
- Objectives: 5x & 10x Objectives
- Suss AL3000 Autoalignment System
- Suss DVM8 Microscope
- Julabo Chiller
- Isolation table (included in main body)
- Operations Manual for MA200
- Suss 1000 Intensity Meter with 365 & 435 nm probes

- Fully Reconditioned to Factory Specifications