Mask Aligner Karl Suss MA 100/150e

SussMicrotec Mask Aligner MA 150e

Remanufactured  Automatic Mask Aligner System,

Configuration:

Suss MA 100/150e Automatic / Windows 10 Based Machine

Cassette to Cassette handling system

Proximity Contact - Vacuum/Cont.

2   Cassette Station MA150   W2“ to W6“ (Wafer and Substrate

3   Alignment System TSA / fully - Automatic and manual alignment system

4   DVM Microscope incl. 5x / 10x / 20x Objective

5   Turret kit DVM6

6   LH350 and CIC1200 power supply

7   HG Lamp 350W

8   Exposure Optics UV 400 HP

9   Suss 2 Channel light -sensor 365 / 400 NM

10  Transport Plates Kit W100 -W150

11  Exposure Chuck W150 Cont./Prox.

12  Maskholder MA150 W6“ -  M7“

13  Prealigner Station Non-Cont. W3“ up to W6“

14  Exposure test dial 150mm

15 Lamphouse 1000 W

16 6" Chuck

All work will be done to SUSS Standards and Specification, Test Exposure and customer qualification can be done.