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Karl Suss MA200 E
Waferfab Equipment - Detail
SUSS MASK ALIGNER MA200 E Windows based with Suss AL / Autoalign System
- Alignment System MA200E TSA
- Chuck 8"
_Mask Holder for 8" Wafer
-PC -Aut. Adjustment ( Cognex Patmex )
- Lamphouse unit LH 1500
- Suss DVM 8 dual video Microscope ( 2CCD – Cameras /set of rotating Objectives L+R )
- 2 piecs Objective 5x
- 2 piecs Objective 10x
- 2 piecs Objective 20X
- Transport Plates ( Kit MA200 / W100-200/Even
- Exposure Chuck Prox/Cont W200
- Maskholder MA 200/TL/Prox/Cont/W200
- CIC1200 Lamp Powersupply
- Set of Exposure optics Typ A / UV400
- Non Contact Prealigner Station with IR – Sensor
- Operators Manual MA 200E English (Digi.)
- Optional: Suss Lightintensity Meter incl. Probe 405NM
- Automatically from cassette to cassette
- Remanufactured according to Suss Standard 2022
- Photo During refurbishment
- MA 200 pre acceptance, performance and qualifications can be done on construction site.
We can offer optional:
Installation and factory qualification at customer site can be done,
by qualified Engineer.